JPS6086880A - 電歪効果素子 - Google Patents

電歪効果素子

Info

Publication number
JPS6086880A
JPS6086880A JP58195739A JP19573983A JPS6086880A JP S6086880 A JPS6086880 A JP S6086880A JP 58195739 A JP58195739 A JP 58195739A JP 19573983 A JP19573983 A JP 19573983A JP S6086880 A JPS6086880 A JP S6086880A
Authority
JP
Japan
Prior art keywords
electrostrictive
layer
effect
internal electrodes
effect element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58195739A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310596B2 (en]
Inventor
Eiichi Sato
栄一 佐藤
Izumi Fukui
福井　泉
Osamu Inui
乾　治
Takeshi Yano
健 矢野
Sadayuki Takahashi
高橋　貞行
Atsushi Ochi
篤 越智
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58195739A priority Critical patent/JPS6086880A/ja
Priority to US06/662,113 priority patent/US4633120A/en
Priority to EP84112592A priority patent/EP0144655B1/en
Priority to DE8484112592T priority patent/DE3468789D1/de
Priority to AU34454/84A priority patent/AU564329B2/en
Priority to CA000465838A priority patent/CA1239965A/en
Priority to KR8406520A priority patent/KR900000834B1/ko
Publication of JPS6086880A publication Critical patent/JPS6086880A/ja
Publication of JPS6310596B2 publication Critical patent/JPS6310596B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP58195739A 1983-10-19 1983-10-19 電歪効果素子 Granted JPS6086880A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP58195739A JPS6086880A (ja) 1983-10-19 1983-10-19 電歪効果素子
US06/662,113 US4633120A (en) 1983-10-19 1984-10-18 Electrostriction transducer comprising electrostriction layers of axially varied thicknesses
EP84112592A EP0144655B1 (en) 1983-10-19 1984-10-18 Electrostriction transducer comprising electrostriction layers of axially varied thicknesses
DE8484112592T DE3468789D1 (en) 1983-10-19 1984-10-18 Electrostriction transducer comprising electrostriction layers of axially varied thicknesses
AU34454/84A AU564329B2 (en) 1983-10-19 1984-10-18 Electrostriction transducer
CA000465838A CA1239965A (en) 1983-10-19 1984-10-19 Electrostriction transducer comprising electrostriction layers of axially varied thicknesses
KR8406520A KR900000834B1 (en) 1983-10-19 1984-10-19 Electrostriction transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58195739A JPS6086880A (ja) 1983-10-19 1983-10-19 電歪効果素子

Publications (2)

Publication Number Publication Date
JPS6086880A true JPS6086880A (ja) 1985-05-16
JPS6310596B2 JPS6310596B2 (en]) 1988-03-08

Family

ID=16346158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58195739A Granted JPS6086880A (ja) 1983-10-19 1983-10-19 電歪効果素子

Country Status (7)

Country Link
US (1) US4633120A (en])
EP (1) EP0144655B1 (en])
JP (1) JPS6086880A (en])
KR (1) KR900000834B1 (en])
AU (1) AU564329B2 (en])
CA (1) CA1239965A (en])
DE (1) DE3468789D1 (en])

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622267U (en]) * 1985-06-19 1987-01-08
JPS6240859U (en]) * 1985-08-29 1987-03-11
JPH02150082A (ja) * 1988-11-30 1990-06-08 Fuji Electric Co Ltd 積層型圧電素子
JPH02205082A (ja) * 1989-02-02 1990-08-14 Fuji Electric Co Ltd 積層型圧電素子の駆動方法
JPH11214762A (ja) * 1998-01-22 1999-08-06 Seiko Epson Corp 圧電体素子及びそれを用いたインクジェット式記録ヘッド
JP2002252386A (ja) * 2001-02-15 2002-09-06 Ceramtec Ag Innov Ceramic Eng 圧電セラミック多層アクチュエーター
JP2002319716A (ja) * 2001-02-15 2002-10-31 Ceramtec Ag Innov Ceramic Eng 圧電セラミック多層アクチュエーターおよびその製造方法
WO2007037377A1 (ja) 2005-09-29 2007-04-05 Kyocera Corporation 積層型圧電素子およびこれを用いた噴射装置
WO2008072746A1 (ja) 2006-12-15 2008-06-19 Kyocera Corporation 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム
US8441174B2 (en) 2005-06-15 2013-05-14 Kyocera Corporation Multilayer piezoelectric element and injector using the same
JP5409772B2 (ja) * 2009-03-25 2014-02-05 京セラ株式会社 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム
JP2021136409A (ja) * 2020-02-28 2021-09-13 日本特殊陶業株式会社 圧電アクチュエータ

Families Citing this family (57)

* Cited by examiner, † Cited by third party
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JPS61205100A (ja) * 1985-03-08 1986-09-11 Murata Mfg Co Ltd 圧電発音体
JPH0732273B2 (ja) * 1986-05-22 1995-04-10 日本電気株式会社 電歪効果素子
JPS63207185A (ja) * 1987-02-23 1988-08-26 Toyota Motor Corp 圧電アクチユエ−タ
SG83626A1 (en) * 1989-07-11 2001-10-16 Seiko Epson Corp Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
US5165809A (en) * 1990-03-06 1992-11-24 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator and print head using the actuator, having means for increasing durability of laminar piezoelectric driver
US5089739A (en) * 1990-03-19 1992-02-18 Brother Kogyo Kabushiki Kaisha Laminate type piezoelectric actuator element
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
JP2545639B2 (ja) * 1990-07-30 1996-10-23 富士通株式会社 積層型圧電素子
DE69028640T2 (de) * 1990-09-28 1997-04-30 Caterpillar Inc Piezoelektrischer schichtachtiger festkörpermotor
JPH04159785A (ja) * 1990-10-23 1992-06-02 Nec Corp 電歪効果素子
JPH0487253U (en]) * 1990-11-30 1992-07-29
DE4201937C2 (de) * 1991-01-25 1997-05-22 Murata Manufacturing Co Piezoelektrisches laminiertes Stellglied
JP2692396B2 (ja) * 1991-02-22 1997-12-17 日本電気株式会社 圧電アクチュエータおよびその製造方法
EP0526048B1 (en) * 1991-07-18 1997-11-12 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
US5168189A (en) * 1991-09-18 1992-12-01 Caterpillar Inc. Solderless connector for a solid state motor stack
US5367500A (en) * 1992-09-30 1994-11-22 The United States Of America As Represented By The Secretary Of The Navy Transducer structure
JP2586371B2 (ja) * 1992-12-22 1997-02-26 日本電気株式会社 圧電アクチュエータ
JPH08153914A (ja) * 1994-11-25 1996-06-11 Philips Japan Ltd 圧電磁器トランス
JP3432974B2 (ja) * 1995-10-13 2003-08-04 日本碍子株式会社 圧電／電歪膜型素子
DE69634797T2 (de) * 1996-01-11 2006-04-27 Wac Data Services Co. Ltd., Fujimi Laminierter piezoelektrischer Antrieb und Verfahren
JP3218972B2 (ja) * 1996-04-01 2001-10-15 株式会社村田製作所 ラダー形フィルタ
JP3266031B2 (ja) * 1996-04-18 2002-03-18 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
US6016024A (en) * 1996-04-05 2000-01-18 Murata Manufacturing Co., Ltd. Piezoelectric component
JP3271517B2 (ja) * 1996-04-05 2002-04-02 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
US5939819A (en) * 1996-04-18 1999-08-17 Murata Manufacturing Co., Ltd. Electronic component and ladder filter
JPH1079639A (ja) * 1996-07-10 1998-03-24 Murata Mfg Co Ltd 圧電共振子およびそれを用いた電子部品
JPH1084244A (ja) * 1996-07-18 1998-03-31 Murata Mfg Co Ltd 圧電共振子およびそれを用いた電子部品
JP3271541B2 (ja) * 1996-07-26 2002-04-02 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
JP3577170B2 (ja) * 1996-08-05 2004-10-13 株式会社村田製作所 圧電共振子とその製造方法およびそれを用いた電子部品
JPH10107579A (ja) * 1996-08-06 1998-04-24 Murata Mfg Co Ltd 圧電部品
JPH10126203A (ja) * 1996-08-27 1998-05-15 Murata Mfg Co Ltd 圧電共振子およびそれを用いた電子部品
JP3267171B2 (ja) * 1996-09-12 2002-03-18 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
JPH10126202A (ja) * 1996-10-23 1998-05-15 Murata Mfg Co Ltd 圧電共振子およびそれを用いた電子部品
JP3271538B2 (ja) * 1996-11-28 2002-04-02 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
CN1198037A (zh) * 1997-04-25 1998-11-04 株式会社村田制作所 压电谐振器和使用它的电子元件
JP3456380B2 (ja) * 1997-09-02 2003-10-14 株式会社村田製作所 圧電アクチュエータ
JP3147834B2 (ja) * 1997-10-03 2001-03-19 株式会社村田製作所 圧電共振子の製造方法
JP4578596B2 (ja) * 1998-09-18 2010-11-10 セイコーインスツル株式会社 振動子、圧電アクチュエータおよびこれらを用いた電子機器
TW432731B (en) * 1998-12-01 2001-05-01 Murata Manufacturing Co Multilayer piezoelectric part
DE19856201A1 (de) * 1998-12-05 2000-06-15 Bosch Gmbh Robert Piezoelektrischer Aktor
DE19928176A1 (de) * 1999-06-19 2001-01-04 Bosch Gmbh Robert Piezoaktor
DE10024701A1 (de) * 2000-05-18 2001-11-29 Bosch Gmbh Robert Piezoaktor
GB0023412D0 (en) * 2000-09-23 2000-11-08 Khaghani Asghar Aortic counterpulsator
DE10147666B4 (de) * 2001-09-27 2011-03-10 Robert Bosch Gmbh Piezoelement und Verfahren zur Herstellung eines Piezoelements
DE10148603B4 (de) * 2001-10-02 2004-02-19 Siemens Ag Aktoreinheit mit wenigstens zwei Aktorelementen
US6614144B2 (en) * 2001-10-04 2003-09-02 Force International, Corp. Multilayer piezoelectric transformer
DE102004002133A1 (de) * 2004-01-15 2005-08-04 Robert Bosch Gmbh Piezoelektrischer Aktor
JP4876467B2 (ja) * 2004-12-06 2012-02-15 株式会社デンソー 積層型圧電素子
WO2006073018A1 (ja) * 2005-01-06 2006-07-13 Murata Manufacturing Co., Ltd. 圧電アクチュエータの製造方法及び圧電アクチュエータ
DE102006021945A1 (de) 2006-05-11 2007-11-15 Robert Bosch Gmbh Piezoelektrischer Aktor und Injektor mit einem piezoelektrischen Aktor für eine Brennkraftmaschine
DE102006032218A1 (de) * 2006-07-12 2008-01-17 Robert Bosch Gmbh Brennstoffeinspritzventil
WO2011006028A2 (en) * 2009-07-10 2011-01-13 Viking At, Llc Small scale smart material actuator and energy harvesting apparatus
JP2012533275A (ja) * 2009-07-10 2012-12-20 ヴァイキング エーティー，エルエルシー 取り付け可能な腕部を有するスマートアクチュエータ装置及びエネルギー取得装置
EP2537246A4 (en) 2010-02-17 2015-04-08 Viking At Llc INTELLIGENT MATERIAL ACTUATOR WITH SWITCHED COMPENSATOR
WO2015100280A1 (en) 2013-12-24 2015-07-02 Viking At, Llc Mechanically amplified smart material actuator utilizing layered web assembly
US10734531B2 (en) 2017-06-22 2020-08-04 The Penn State Research Foundation Two-dimensional electrostrictive field effect transistor (2D-EFET)
US11632063B1 (en) * 2019-08-27 2023-04-18 Meta Platforms Technologies, Llc Structured actuators

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DE899770C (de) * 1937-05-28 1953-12-17 Atlas Werke Ag Piezoelektrischer Biegeschwinger
US3154700A (en) * 1961-01-09 1964-10-27 Joseph T Mcnaney Piezoelectric transducer force to motion converter
US4229812A (en) * 1971-11-24 1980-10-21 The United States Of America As Represented By The Secretary Of The Navy Apparatus for securing a ferroelectric stack to a weighted projection surface
JPS5235994A (en) * 1975-09-16 1977-03-18 Nippon Telegr & Teleph Corp <Ntt> Piezo electric type digital quivering element
US4342935A (en) * 1980-04-10 1982-08-03 Discovision Associates Binary piezoelectric drive for lens focusing system
US4384230A (en) * 1980-11-06 1983-05-17 United Technologies Corporation Digital piezoelectric actuator
US4435666A (en) * 1981-05-26 1984-03-06 Nippon Electric Co., Ltd. Lever actuator comprising a longitudinal-effect electroexpansive transducer and designed to prevent actuation from degrading the actuator
US4438364A (en) * 1981-07-13 1984-03-20 The Garrett Corporation Piezoelectric actuator
JPS5943582A (ja) * 1982-09-03 1984-03-10 Toshiba Corp 圧電変位装置

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622267U (en]) * 1985-06-19 1987-01-08
JPS6240859U (en]) * 1985-08-29 1987-03-11
JPH02150082A (ja) * 1988-11-30 1990-06-08 Fuji Electric Co Ltd 積層型圧電素子
JPH02205082A (ja) * 1989-02-02 1990-08-14 Fuji Electric Co Ltd 積層型圧電素子の駆動方法
JPH11214762A (ja) * 1998-01-22 1999-08-06 Seiko Epson Corp 圧電体素子及びそれを用いたインクジェット式記録ヘッド
JP2002319716A (ja) * 2001-02-15 2002-10-31 Ceramtec Ag Innov Ceramic Eng 圧電セラミック多層アクチュエーターおよびその製造方法
JP2002252386A (ja) * 2001-02-15 2002-09-06 Ceramtec Ag Innov Ceramic Eng 圧電セラミック多層アクチュエーター
JP2012134528A (ja) * 2001-02-15 2012-07-12 Ceramtec Ag Innovative Ceramic Engineering 圧電セラミック多層アクチュエーター
US8441174B2 (en) 2005-06-15 2013-05-14 Kyocera Corporation Multilayer piezoelectric element and injector using the same
US8648517B2 (en) 2005-06-15 2014-02-11 Kyocera Corporation Multilayer piezoelectric element and injector using the same
WO2007037377A1 (ja) 2005-09-29 2007-04-05 Kyocera Corporation 積層型圧電素子およびこれを用いた噴射装置
US8288921B2 (en) 2005-09-29 2012-10-16 Kyocera Corporation Multilayer piezoelectric element and injector using the same
WO2008072746A1 (ja) 2006-12-15 2008-06-19 Kyocera Corporation 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム
JP5409772B2 (ja) * 2009-03-25 2014-02-05 京セラ株式会社 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム
JP2021136409A (ja) * 2020-02-28 2021-09-13 日本特殊陶業株式会社 圧電アクチュエータ

Also Published As

Publication number Publication date
AU3445484A (en) 1985-04-26
KR900000834B1 (en) 1990-02-17
US4633120A (en) 1986-12-30
CA1239965A (en) 1988-08-02
EP0144655B1 (en) 1988-01-13
DE3468789D1 (en) 1988-02-18
KR850003466A (ko) 1985-06-17
EP0144655A1 (en) 1985-06-19
AU564329B2 (en) 1987-08-06
JPS6310596B2 (en]) 1988-03-08

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